Fiber textures of titanium nitride and hafnium nitride thin films deposited by off-normal incidence magnetron sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2980325
Reference25 articles.
1. Structure and properties of TiN coatings
2. Microstructure modification of TiN by ion bombardment during reactive sputter deposition
3. Influence of N2 flow ratio on the properties of hafnium nitride thin films prepared by DC magnetron sputtering
4. Texture Development in Titanium Nitride Films Grown by Low-Energy Ion Assisted Deposition
5. Manipulation of texture by low-energy ion beams: Example ion assisted deposition of titanium nitride
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4. Fast pole figure acquisition using area detectors at the DiffAbs beamline – Synchrotron SOLEIL;Journal of Applied Crystallography;2013-11-15
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