Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature-Reference-Cited by-同舟云学术

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Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature

Published:2020-12 Issue: Volume:170 Page:93-99
ISSN:0008-6223
Container-title:Carbon
language:en
Short-container-title:Carbon

Author:

Sugiura Hirotsugu,Kondo Hiroki^ORCID,Higuchi Kimitaka,Arai Shigeo,Hamaji Ryo,Tsutsumi Takayoshi,Ishikawa Kenji,Hori Masaru

Funder

JSPS KAKENHI

Nanotechnology Platform Program (Advanced Characterization) of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan

Publisher

Elsevier BV

Subject

General Chemistry,General Materials Science

Reference44 articles.

1. Controlling the electronic structure of bilayer graphene;Ohta;Science,2006

2. Direct observation of a widely tunable bandgap in bilayer graphene;Zhang;Nature,2009

3. Optical transmittance of multilayer graphene;Zhu;Europhys. Lett.,2014

4. Non-destructive measurement of photoexcited carrier transport in graphene with ultrafast grating imaging technique;Chen;Carbon,2016

5. Mechanisms of graphene fabrication through plasma-induced layer-by-layer thinning;Seah;Carbon,2016

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Selective removal of single-layer graphene over double-layer graphene on SiO2 by remote oxygen plasma irradiation;Applied Surface Science;2024-10

2. Future of plasma etching for microelectronics: Challenges and opportunities;Journal of Vacuum Science & Technology B;2024-06-07

3. Surface sulfurization of amorphous carbon films in the chemistry of oxygen plasma added with SO2 or OCS for high-aspect-ratio etching;Applied Surface Science;2024-02

4. Radical-controlled plasma processes;Reviews of Modern Plasma Physics;2022-11-10

5. First-principles investigation of interaction between the atomic oxygen species and carbon nanostructures;Carbon Trends;2022-10

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