Selective removal of single-layer graphene over double-layer graphene on SiO2 by remote oxygen plasma irradiation
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Published:2024-10
Issue:
Volume:669
Page:160598
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ISSN:0169-4332
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Container-title:Applied Surface Science
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language:en
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Short-container-title:Applied Surface Science
Author:
Hu LiugangORCID,
Ishikawa Kenji,
Nguyen Thi-Thuy-NgaORCID,
Hsiao Shih-NanORCID,
Hori Masaru