Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
17 articles.
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1. Range of high energy phosphorus and medium energy boron ions implanted in polymers;Solid-State Electronics;1990-06
2. PHOTORESIST PROBLEMS AND PARTICLE CONTAMINATION;Ion Implantation Science and Technology;1988
3. Polymers as masks for Ion implantation;Journal of Electronic Materials;1987-01
4. Range of boron ions in polymers: A SIMS study;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1985-01
5. The range of light ions in polymeric resists;Journal of Applied Physics;1984-09-15