Author:
Chalupka A.,Fegerl J.,Fischer R.,Lammer G.,Löschner H.,Malek L.,Nowak R.,Stengl G.,Traher C.,Wolf P.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
17 articles.
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1. Photolithography;Materials Science and Technology;2013-02-15
2. Prospects of ion projection techniques for maskless implantation at high ion energies;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-04
3. Applications of Ion Microbeams Lithography and Direct Processing;Handbook of VLSI Microlithography;2001
4. Overview of the ion projection lithography European MEDEA and international program;SPIE Proceedings;2000-07-21
5. Microprobe as implanter for semiconductor devices;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-09