Electron‐projection microfabrication system-Reference-Cited by-同舟云学术

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Electron‐projection microfabrication system

Published:1975-11 Issue:6 Volume:12 Page:1135-1140
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Heritage M. B.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.568475

Cited by 92 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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