Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
21 articles.
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1. Fabrication of hierarchical nanostructures using binary colloidal nanosphere assembly;Journal of Vacuum Science & Technology B;2023-10-12
2. Photoresists based on bisphenol A derivatives with tert-butyl ester groups for electron beam lithography;Journal of Photochemistry and Photobiology A: Chemistry;2023-03
3. Stitch-avoiding Detailed Routing for Multiple E-Beam Lithography;2022 IFIP/IEEE 30th International Conference on Very Large Scale Integration (VLSI-SoC);2022-10-03
4. Reduction of exposing time in massively-parallel E-beam systems;Journal of Vacuum Science & Technology B;2022-05
5. Stitch-avoiding Global Routing for Multiple E-Beam Lithography;2022 35th International Conference on VLSI Design and 2022 21st International Conference on Embedded Systems (VLSID);2022-02