Stitch-avoiding Global Routing for Multiple E-Beam Lithography
Author:
Affiliation:
1. Advanced Computing and Microelectronics Unit, Indian Statistical Institute,Kolkata,India
2. University of Calcutta,Department of Computer Science and Engineering,Kolkata,India
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9885796/9885734/09885920.pdf?arnumber=9885920
Reference11 articles.
1. Faraday benchmarks;ICCAD,2004
2. Post-Layout Perturbation towards Stitch Friendly Layout for Multiple E-Beam Lithography
3. NTUplace3: An Analytical Placer for Large-Scale Mixed-Size Designs With Preplaced Blocks and Density Constraints
4. Flute: Fast lookup table based technique for rsmt construction and wirelength estimation;chu,0
5. RegularRoute: An Efficient Detailed Router Applying Regular Routing Patterns
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1. Stitch-avoiding Detailed Routing for Multiple E-Beam Lithography;2022 IFIP/IEEE 30th International Conference on Very Large Scale Integration (VLSI-SoC);2022-10-03
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