Prospects of ion projection techniques for maskless implantation at high ion energies
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference23 articles.
1. High‐resolution focused ion beams
2. Microprobe as implanter for semiconductor devices
3. Proton micromachining: a new technique for the production of three-dimensional microstructures
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5. Progress in ion projection lithography
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