Author:
Shen X.Q,Tanaka S,Iwai S,Aoyagi Y
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Cited by
4 articles.
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1. Focused gas beam injection for efficient ammonia-molecular beam epitaxial growth of III-nitride semiconductors;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-03
2. Supersonic jet epitaxy of gallium nitride using triethylgallium and ammonia;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2003-01
3. Substrates for gallium nitride epitaxy;Materials Science and Engineering: R: Reports;2002-04
4. An apparatus for supersonic jet epitaxy of thin films;Review of Scientific Instruments;2000-03