Focused gas beam injection for efficient ammonia-molecular beam epitaxial growth of III-nitride semiconductors
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Published:2016-03
Issue:2
Volume:34
Page:02L116
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ISSN:2166-2746
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Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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language:en
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Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Author:
Boucherif Abderrahim Rahim,Rondeau Maxime,Pelletier Hubert,Provost Philippe-Olivier,Boucherif Abderraouf,Dubuc Christian,Maher Hassan,Arès Richard
Publisher
American Vacuum Society
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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