Author:
Hemment P.L.F.,Reeson K.J.,Robinson A.K.,Kilner J.A.,Chater R.J.,Marsh C.D.,Christensen K.N.,Davis J.R.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
16 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Kinetics and Depth Distributions of Oxygen Implanted into Si Analyzed by the Monte Carlo Simulation of Extended TRIM;Japanese Journal of Applied Physics;1997-12-15
2. Structure of stacking fault pyramids in silicon‐on‐insulator material;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1995-09
3. Observation of local SIMOX layers by microprobe RBS;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
4. Observation of buried oxide layers in silicon by microprobe RBS;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-05
5. Distribution of Ge in O+implanted silicon;Applied Physics Letters;1992-12-28