Author:
Kinomura A.,Lohner T.,Katayama Y.,Takai M.,Ryssel H.,Schork R.,Chayahara A.,Horino Y.,Fujii K.,Satou M.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Applications of nuclear microprobes in the semiconductor industry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-06
2. Applications of focused MeV ions to materials modification and analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
3. Observation of local SIMOX layers by microprobe RBS;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03