Author:
Kinomura A.,Horino Y.,Mokuno Y.,Chayahara A.,Kiuchi M.,Fujii K.,Takai M.,Lohner T.,Ryssel H.,Schork R.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
5 articles.
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1. Ir and Rh silicide formation investigated by microprobe RBS;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-07
2. Microanalysis of a submicron patterned WSix structure using a nuclear microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-07
3. Applications of focused MeV ions to materials modification and analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
4. Applications of nuclear microprobes to semiconductor process developments;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
5. Applications of focused ions beams to nondestructive analyses;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03