Author:
Park Y.K.,Kishimoto T.,Takai M.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
8 articles.
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1. Rutherford Backscattering Spectroscopy;Encyclopedia of Analytical Chemistry;2006-09-15
2. Medium energy nuclear microprobe with enhanced sensitivity for semiconductor process analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-07
3. Investigation of Cu films by focused ion beam induced deposition using nuclear microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-09
4. Impurity incorporation during beam assisted processing analyzed using nuclear microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-09
5. Comparison of beam-induced deposition using ion microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-01