Application of hydrogen ion beams to Silicon On Insulator material technology
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference10 articles.
1. Proc. 1992 IEEE Int. SOI Conf;Mumola,1992
2. Silicon on insulator material technology
3. Plasma Contamination and Wall Erosion in Thermonuclear Reactors
4. The role of inert gases in first wall phenomena in fusion devices
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