Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Nuclear Energy and Engineering,Nuclear and High Energy Physics
Cited by
69 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Smart Cut™: Review on an attractive process for innovative substrate elaboration;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-04
2. Soi Materials;Silicon-on-Insulator Technology: Materials to VLSI;2004
3. Silicon-on-Insulator and Porous Silicon;Silicon;2004
4. Annealing behavior of implanted helium in indium phosphide;Applied Physics Letters;2001-01-08
5. WHY CAN SMART CUT® CHANGE THE FUTURE OF MICROELECTRONICS?;International Journal of High Speed Electronics and Systems;2000-03