Subject
Instrumentation,Nuclear and High Energy Physics
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11 articles.
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1. Surface modification of the poly(ethyleneterephthalate) foil by reactive ion beam bombardment;Vacuum;1996-09
2. Charged particle energy spectrometers and their applications in fundamental studies of wafer charging and ion beam tuning phenomena;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
3. The precision implant 9500 plasma flood system — the advanced solution to wafer charging;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
4. Charge neutralization in ion implanters;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
5. The ring plasma neutralizer for ion beam devices;Surface and Coatings Technology;1994-08