Author:
England J.G.,Cook C.E.A.,Armour D.G.,Foad M.A.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Studies of wafer surface charging using the THOR monitor device;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
2. Plasma model for charging damage;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
3. Surface charge control during high-current ion implantation: characterization with CHARM-2 sensors;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03