Inductively coupled high-density plasma-induced etch damage of GaN MESFETs-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Inductively coupled high-density plasma-induced etch damage of GaN MESFETs

Published:2001-01 Issue:1 Volume:45 Page:13-17
ISSN:0038-1101
Container-title:Solid-State Electronics
language:en
Short-container-title:Solid-State Electronics

Author:

Shul R.J,Zhang L,Baca A.G,Willison C.G,Han J,Pearton S.J,Lee K.P,Ren F

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Wide bandgap semiconductor materials and devices

2. GaN based transistors for high power applications

3. A review of junction field effect transistors for high-temperature and high-power electronics

4. Microwave performance of 0.25 [micro sign]m doped channel GaN/AlGaN heterostructure field effect transistor at elevated temperatures

5. High-power 10-GHz operation of AlGaN HFET's on insulating SiC

Cited by 31 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Damage-Free Plasma Source for Atomic-Scale Processing;Nano Letters;2024-09-06

2. Performance evaluation of GaN etching using Cl2-based plasma with bias pulsing;Journal of Vacuum Science & Technology A;2024-06-18

3. Suppressed current collapse and improved threshold voltage stability of AlGaN/GaN HEMT via O2 plasma treatment;Microelectronics Journal;2024-06

4. Challenges in atomic layer etching of gallium nitride using surface oxidation and ligand-exchange;Journal of Vacuum Science & Technology A;2023-03-01

5. Miniature Mesa Extension for a Planar Submicron AlGaN/GaN HEMT Gate Formation;Micromachines;2022-11-18

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3