Preparation and characterization of Er-doped AlN films by RF magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference12 articles.
1. Influence of sputtering power on crystal quality and electrical properties of Sc-doped AlN film prepared by DC magnetron sputtering;Yang;Appl. Surf. Sci.,2013
2. Piezoelectric aluminum nitride thin films for microelectromechanical systems;Piazza;MRS Bull.,2012
3. Nanoenabled micro-electromechanical sensor for volatile organic chemical detection;Zuniga;Appl. Phys. Lett.,2009
4. Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering;Akiyama;Adv. Mater.,2009
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