Enhanced piezoelectric response of AlN via alloying of transitional metals, and influence of type and distribution of transition metals

Author:

Zha Xian-Hu,Ma Xiufang,Luo Jing-Ting,Fu Chen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,General Materials Science,Renewable Energy, Sustainability and the Environment

Reference65 articles.

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3. Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators;Loebl;Mater. Chem. Phys.,2003

4. Piezoelectric aluminum nitride thin films for microelectromechanical systems;Piazza;MRS Bull.,2012

5. Acoustically driven programmable microfluidics for biological and chemical applications;Wixforth;JALA,2016

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