Recent Progress in Materials Issues for Piezoelectric MEMS
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1551-2916.2008.02421.x/fullpdf
Reference119 articles.
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2. Generation and detection of ultrasonic Lamb waves in a thin deposited film by using interdigital transducers
3. Silicon micromachined ultrasonic immersion transducers
4. Capacitive Micromachined Ultrasonic Transducers: Theory and Technology
5. Comb actuators for xy-microstages
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