KNN lead-free technology on 200 mm Si wafer for piezoelectric actuator applications

Author:

Kuentz Hugo,Dieppedale Christel,Mollard Laurent,Liechti Romain,Campo Alain,Hamelin Antoine,Demange Valérie,Poulain Christophe,Guilloux-Viry Maryline,Le Rhun Gwenaël

Publisher

Elsevier BV

Reference30 articles.

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3. Yole Developpement, piezoelectric devices: from bulk to thin-film 2019 report by Yole Dév…, 〈https://fr.slideshare.net/Yole_Developpement/piezoelectric-devices-from-bulk-to-thinfilm-2019-report-by-yole-dveloppement〉.

4. Review: environmental friendly lead-free piezoelectric materials;Panda;J. Mater. Sci.,2009

5. Study to assess requests for a renewal of nine (-9-) exemptions 6 (a), 6 (a)-I, 6 (b), 6 (b)-I, 6 (b)-II, 6 (c), 7 (a), 7 (c)-I and 7 (c)-II of Annex III of Directive 2011/65/EU (Pack 22)–Final Report;Baron;Oeko-Inst. eV, Freibg.,2021

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