Capacitive Micromachined Ultrasonic Transducers: Theory and Technology-Reference-Cited by-同舟云学术

Capacitive Micromachined Ultrasonic Transducers: Theory and Technology

Published:2003-04 Issue:2 Volume:16 Page:76-84
ISSN:0893-1321
Container-title:Journal of Aerospace Engineering
language:en
Short-container-title:J. Aerosp. Eng.

Author:

Ergun Arif S.¹,Yaralioglu Goksen G.¹,Khuri-Yakub Butrus T.¹

Affiliation:

1. E. L. Ginzton Laboratory, Stanford Univ., Stanford, CA 94305-4088.

Publisher

American Society of Civil Engineers (ASCE)

Subject

Mechanical Engineering,Aerospace Engineering,General Materials Science,Civil and Structural Engineering

Link

http://ascelibrary.org/doi/pdf/10.1061/%28ASCE%290893-1321%282003%2916%3A2%2876%29

Reference14 articles.

1. Bayram B. Yaralioglu G. G. and Khuri-Yakub B. T. (2001). “Influence of the electrode size and location on the performance of a CMUT.” 2001 IEEE Int. Ultrasonics Symposium Atlanta October 7–10.

2. Belincourt D. (1971). “Piezoelectric crystals and ceramics.” Ultrasonic transducer materials O.E. Mattiat ed. Plenum New York.

3. Cheng C. H. Ergun A. S. and Khuri-Yakub B. T. (2002). “Electrical through wafer interconnects with 0.05 pico farads parasitic capacitance on 400 μm thick silicon substrate.” Solid State Sensor Actuator and Microsystems Workshop Hilton Head Island S.C. June 2–6 157–160.

4. Fraser J. and Reynolds P. (2000). “Finite-element method for determination of electromechanical coupling coefficient for piezoelectric and capacitive micromachined ultrasonic transducers.” Joint 140th Meeting of the Acoustical Society of America/Noise Contro Newport Beach Calif. December 3–8.

5. A surface micromachined electrostatic ultrasonic air transducer

Cited by 141 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A discrete CMUT self-biasing circuit towards implanted devices application;Sensors and Actuators A: Physical;2024-12

2. Performance analysis of FEM simulated different shaped membranes based capacitive MEMS sensor;Microsystem Technologies;2024-08-24

3. CMUT as a Transmitter for Microbubble-Assisted Blood-Brain Barrier Opening;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2024-08

4. Membrane-Based NEMS/MEMS Biosensors;ACS Applied Electronic Materials;2024-04-05

5. Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer With Dynamic Control Provision of Effective Cavity Height;IEEE Sensors Journal;2024-03-01