Finite‐element method for determination of electromechanical coupling coefficient for piezoelectric and capacitive micromachined ultrasonic transducers
Author:
Publisher
Acoustical Society of America (ASA)
Subject
Acoustics and Ultrasonics,Arts and Humanities (miscellaneous)
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ultra-Low-Voltage High-Efficiency CMUTs with Piston-Structured Plates for Fill Level Sensing;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10
2. Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates;Micromachines;2022-04-26
3. Vertical cavity capacitive transducer;The Journal of the Acoustical Society of America;2021-04
4. Chemical Vapor Detection Using a Capacitive Micromachined Ultrasonic Transducer;Analytical Chemistry;2011-11-29
5. MEMS/NEMS Techniques and Applications;MEMS/NEMS;2006
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