Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering-Reference-Cited by-同舟云学术

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Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

Published:2008-12-02 Issue:5 Volume:21 Page:593-596
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Akiyama Morito,Kamohara Toshihiro,Kano Kazuhiko,Teshigahara Akihiko,Takeuchi Yukihiro,Kawahara Nobuaki

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference25 articles.

1. A miniaturized high-temperature pressure sensor for the combustion chamber of a spark ignition engine

2. Piezoelectric Materials at Elevated Temperature

3. Piezoelectric materials for high power, high temperature applications

4. Materials for high temperature acoustic and vibration sensors: A review

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