A piezoelectric MEMS microphone with proof mass and its array-Reference-Cited by-同舟云学术

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A piezoelectric MEMS microphone with proof mass and its array

Published:2024-10 Issue: Volume:377 Page:115735
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lu Liangyu,Liu Wenjuan,Hu Bohao,Yang Chaoxiang,Wang Zekai,Liu Yan,Cai Yao,Wang Jian,Guo Shishang,Sun Chengliang

Publisher

Elsevier BV

Reference38 articles.

1. CMOS-Integrated aluminum nitride MEMs: a review;Pinto;J. Micro Syst.,2022

2. Recent development and futuristic applications of MEMS based piezoelectric microphones;Kumar;Sens. Actuators A: Phys.,2022

3. A review on modeling of few MEMS devices and further issues;Roy;2017 Recent Dev. Control Autom. Power Eng. (RDCAPE),2017

4. High Performance Piezoelectric MEMS Microphones;Littrell,2010

5. F. Cerini, S. Adorno, Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation, Eurosensors 2018 2018.

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