Assessment of the SEMI energy conversion factor and its application for semiconductor and LCD fabs-Reference-Cited by-同舟云学术

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Assessment of the SEMI energy conversion factor and its application for semiconductor and LCD fabs

Published:2017-07 Issue: Volume:121 Page:39-47
ISSN:1359-4311
Container-title:Applied Thermal Engineering
language:en
Short-container-title:Applied Thermal Engineering

Author:

Hu Shih-Cheng,Tsai Yao-Wen,Fu Ben-Ran,Chang Cheng-Kuang

Funder

Ministry of Science and Technology, Taiwan

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Energy Engineering and Power Technology

Reference21 articles.

1. Various energy-saving approaches to a TFT-LCD panel fab;Chang;Sustainability,2016

2. The 1.7kg microchip: energy and material use in the production of semiconductor devices;Williams;Environ. Sci. Technol.,2002

3. Developing an innovative fan dry coil unit (FDCU) return system to improve energy efficiency of environmental control for mission critical cleanrooms;Lin;Energy Build,2015

4. Effects of the removal of 0.1 µm particles in industrial cleanrooms with fan dry coil unit (FDCU) return systems;Lin;Aerosol Air Qual. Res.,2010

5. A comparative study on energy consumption for HVAC systems of high-tech FABs;Hu;Appl. Therm. Eng.,2007

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