Developing an innovative fan dry coil unit (FDCU) return system to improve energy efficiency of environmental control for mission critical cleanrooms

Author:

Lin Tee,Hu Shih-Cheng,Xu Tengfang

Funder

National Science Council of R.O.C (Taiwan)

Department of Industrial Technology, Ministry of Economic Affairs, R.O.C (Taiwan)

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Building and Construction,Civil and Structural Engineering

Reference29 articles.

1. Power consumption of semiconductor fabs in Taiwan;Hu;Energy – Int. J.,2003

2. Worldwide fab energy survey report, Technology Transfer #99023669A-ENG, Austin TX, February 1999;International SEMATECH Manufacturing Initiative (ISMI),1999

3. Summary Facilities Energy Consumption in 200mm and 300mm Fabs. Technology Transfer #08024920A-TR;International SEMATECH Manufacturing Initiative (ISMI),2008

4. Considerations for efficient airflow design in cleanrooms;Xu,2004

5. Life cycle assessment of high-technology buildings: energy consumption and associated environmental impacts of wafer fabrication plants;Hu;Energy Build.,2013

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