Author:
Tang Shaoping,Wallace Robert M,Seabaugh Alan,King-Smith Dominic
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference31 articles.
1. The National Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, CA, 1997, pp. 14,46.
2. S.T. Pantelides (Eds.), The Physics of SiO2 and Its Interfaces, Pergamon, New York, 1978.
3. C.R. Helms, B.E. Deal (Eds.), The Physics and Chemistry of SiO2 and the Si–SiO2 Interface 2, Plenum, New York, 1993.
4. Microscopic structure of theSiO2/Si interface
5. Si/SiO2interface: New structures and well-defined model systems
Cited by
60 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献