The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2

Author:

Helms C. Robert,Deal Bruce E.

Publisher

Springer US

Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Memory Characteristics of Capacitors with Poly-GaP Floating Gates;Applied Science and Convergence Technology;2020-11-30

2. Interface reaction kinetics in SiGe oxidation;Applied Physics Letters;2019-12-02

3. Dielectric Materials for Microelectronics;Springer Handbook of Electronic and Photonic Materials;2017

4. Memory characteristics of capacitors with poly‐GaAs floating gates;Electronics Letters;2016-05

5. Structural Analyses of Thin SiO2Films Formed by Thermal Oxidation of Atomically Flat Si Surface by Using Synchrotron Radiation X-Ray Characterization;ECS Journal of Solid State Science and Technology;2015

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