Effect of oxide layer and size on the vibration frequency of silicon nanobeams

Abstract

We studied the vibration frequencies of small double-clamped silicon nanobeams using a molecular dynamics method. The effects of cross-section area, size, and oxide layer were investigated through simulation. The results show that the vibration frequency decreases with increasing length, whereas it increases slightly with increasing cross-section area of the nanobeam. The existence and thickness of an oxide layer lead to increasing of the vibration frequency of silicon nanobeams.