Author:
Li X.,Goodhue W.D.,Santeufeimio C.,Tetreault T.G.,MacCrimmon R.,Allen L.P.,Bliss D.,Krishnaswami K.,Sung C.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference7 articles.
1. Physics and technology of Gallium antimonide: an emerging optoelectronic material;Dutta;J. Appl. Phys.,1997
2. I. Yamada, J. Matsuo, N. Toyoda, A. Kirkpatrick, Materials processing by gas cluster ion beams, Mater. Sci. Eng., R 34(6) (2001) 231.
3. Substrate smoothing using gas cluster ion beam processing;Allen;J. Electr. Mater.,2001
4. Nano-scale surface texture by impact of accelerated condensed-gas nanoparticles;Allen;Proc. SPIE,2002
5. Craters on Si surfaces created by gas cluster ion impacts;Allen;J. Appl. Phys.,2002
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献