Development of gas cluster ion beam irradiation system with an orthogonal acceleration TOF instrument-Reference-Cited by-同舟云学术

Development of gas cluster ion beam irradiation system with an orthogonal acceleration TOF instrument

Author:

Ichiki K.¹,Tamura J.²,Seki T.¹³,Aoki T.⁴³,Matsuo J.⁵³

Affiliation:

1. Department of Nuclear Engineering; Kyoto University; Sakyo Kyoto 606-8501 Japan

2. JEOL Ltd; Tokyo Japan

3. CREST; Japan Science and Technology Agency (JST); Chiyoda Tokyo 102-0075 Japan

4. Department of Electronic Science and Engineering; Kyoto University; Nishikyo Kyoto 615-8510 Japan

5. Quantum Science and Engineering Center; Kyoto University; Uji Kyoto 611-0011 Japan

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

Reference18 articles.

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

2. Gas cooling secondary ions emitted by gas cluster ion beam at the travelling-wave ion guide of a Q-ToF-SIMS system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-07

4. Cluster ion beam bombardment and Q-ToF-SIMS analysis of large biomolecules;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-06