Growth of SiGe/Ge/SiGe heterostructures with ultrahigh hole mobility and their device application
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference14 articles.
1. High-mobility Si and Ge structures
2. Very high hole mobilities in modulation-doped Ge quantum wells grown by low-energy plasma enhanced chemical vapor deposition
3. Extremely high room-temperature two-dimensional hole gas mobility in Ge/Si0.33Ge0.67/Si(001)p-type modulation-doped heterostructures
4. High room-temperature hole mobility in Ge0.7Si0.3/Ge/Ge0.7Si0.3 modulation-doped heterostructures
5. Carrier mobilities in modulation doped Si1−xGex heterostructures with respect to FET applications
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1. Structural properties of compressive strained Ge channels fabricated on Si (111) and Si (100);Semiconductor Science and Technology;2018-10-26
2. Novel growth techniques of group-IV based semiconductors on insulator for next-generation electronics;Japanese Journal of Applied Physics;2017-04-18
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4. Acceptor-Like States in SiGe Alloy Related to Point Defects Induced by Si+Ion Implantation;Japanese Journal of Applied Physics;2012-10-01
5. Acceptor-Like States in SiGe Alloy Related to Point Defects Induced by Si$^{+}$ Ion Implantation;Japanese Journal of Applied Physics;2012-09-25
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