High rate sputtering techniques
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference46 articles.
1. Thin Film Processes;Thornton,1978
2. Thin Film Processes;Fraser,1978
3. Thin Film Processes;Waits,1978
4. Magnetron sputtering: basic physics and application to cylindrical magnetrons
5. Abstract: High‐rate sputter deposition—circular magnetrons
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