Precise patterning of diamond films for MEMS application-Reference-Cited by-同舟云学术

Precise patterning of diamond films for MEMS application

Published:2002-09 Issue:2 Volume:127 Page:230-233
ISSN:0924-0136
Container-title:Journal of Materials Processing Technology
language:en
Short-container-title:Journal of Materials Processing Technology

Author:

Wang X.D,Hong G.D,Zhang J,Lin B.L,Gong H.Q,Wang W.Y

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modeling and Simulation,Ceramics and Composites

Reference8 articles.

1. Techniques for Patterning of CVD Diamond Films on Non‐Diamond Substrates

2. Patterning of CVD diamond films by seeding and their field emission properties

3. M. Edo, Y. Watnabe, E. Yonezawa, in: Proceedings of the International Symposium on Microsystems, Intelligent Material and Robotics, Sendai, Japan, 1996, p. 177.

4. Fine patterning of diamond films by laser-assisted chemical etching in oxygen

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