Author:
Ral'chenko V.G.,Korotushenko K.G.,Smolin A.A.,Loubnin E.N.
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Etching of polycrystalline diamond and amorphous carbon films by RIE
2. Proc. 2nd Int. Conf. on Applications of Diamond Films and Related Materials;Shikata,1993
Cited by
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