Chemical dry etching of GaAs(100) by HC1: products, rate, and a kinetic model-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Chemical dry etching of GaAs(100) by HC1: products, rate, and a kinetic model

Published:1994-06 Issue:1-2 Volume:312 Page:181-197
ISSN:0039-6028
Container-title:Surface Science
language:en
Short-container-title:Surface Science

Author:

Su Chaochin,Dai Zi-Guo,Luo Weiang,Sun Dong-Hong,Vernon Matthew F.,Bent Brian E.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Reference35 articles.

1. In SituDeoxidation of GaAs Substrates by HCl Gas

2. In situ chemical etching of GaAs(001) and InP(001) substrates by gaseous HCl prior to molecular-beam epitaxy growth

3. Molecular layer etching of GaAs

4. Effects of etching with a mixture of HCl gas and H2on the GaAs surface cleaning in molecular‐beam epitaxy

5. GaAs Surface Cleaning with HCl Gas and Hydrogen Mixture for Molecular-Beam-Epitaxial Growth

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. In situ and selective area etching of GaN by tertiarybutylchloride (TBCl);Applied Physics Letters;2019-10-14

2. Uniform lateral etching of tungsten in deep trenches utilizing reaction-limited NF3plasma process;Japanese Journal of Applied Physics;2017-05-22

3. Use of molecular beams for kinetic measurements of chemical reactions on solid surfaces;Surface Science Reports;2017-05

4. Selective atomic-level etching using two heating procedures, infrared irradiation and ion bombardment, for next-generation semiconductor device manufacturing;Journal of Physics D: Applied Physics;2017-04-13

5. Crystal structure tuning in GaAs nanowires using HCl;Nanoscale;2014

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3