Mechanisms of disilane decomposition on Si(111)-7 × 7
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference23 articles.
1. Modulated molecular beam scattering of disilane on silicon
2. Silicon homoepitaxial thin films via silane pyrolysis: A HEED and Auger electron spectroscopy study
3. The Kinetics of Silicon Deposition on Silicon by Pyrolysis of Silane
4. A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniques I.—experimental methods
5. Reactive sticking coefficients for silane and disilane on polycrystalline silicon
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