Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference35 articles.
1. Microelectronic Applications of Chemical Mechanical Planarization,2008
2. Chemical Mechanical Planarization of Semiconductor Materials,2004
3. The International Technology Roadmap for Semiconductors: http://www.itrs.net/Links/2006Update/2006UpdateFinal.htm.
4. Effects of CMP Process Conditions on Defect Generation in Low-k Materials
5. Chemical mechanical planarization of copper using abrasive-free solutions of oxalic acid and hydrogen peroxide
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献