1. Chapter 10 - Chemical mechanical polishing method and practice;Cadien,2018
2. Slurry components in metal chemical mechanical planarization (CMP) process: a review;Lee;Int. J. Precis. Eng. Manuf.,2016
3. Recent developments and applications of chemical mechanical polishing;Zhong;Int. J. Adv. Manufact. Technol.,2020
4. Chapter 5 - Post-CMP cleaning;Chen,2018
5. Perspective—Electrochemical assessment of slurry formulations for chemical mechanical planarization of metals: trends, benefits and challenges;Roy;ECS J. Solid State Sci. Technol.,2018