Expanded beam (macro-imaging) ellipsometry-Reference-Cited by-同舟云学术

Expanded beam (macro-imaging) ellipsometry

Published:2011-02 Issue:9 Volume:519 Page:2730-2736
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Fried M.,Juhász G.,Major C.,Petrik P.,Polgár O.,Horváth Z.,Nutsch A.

Funder

EU FP6 ANNA

Hungarian NKTH

DAAD-MÖB

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Performance of a microscopic imaging ellipsometer

2. Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates

3. HORVÁTH, Zoltán György; JUHÁSZ, György; FRIED, Miklós; MAJOR, Csaba; PETRIK, Péter; Pub. No.: WO/2008/142468; International Application No.: PCT/HU2008/000058; Publication Date: 27.11.2008; Priority Data: P 0700366 23.05.2007 HU.

4. Wide angle beam ellipsometry for extremely large samples

5. Non-collimated beam ellipsometry

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