Dynamic spectroscopic imaging ellipsometry-Reference-Cited by-同舟云学术

Dynamic spectroscopic imaging ellipsometry

Published:2022-02-22 Issue:5 Volume:47 Page:1129
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Kim Daesuk¹,Dembele Vamara¹^ORCID,Choi Sukhyun¹^ORCID,Hwang Gukhyeon¹^ORCID,Kheiryzadehkhanghah Saeid¹^ORCID,Joo Chulmin²,Magnusson Robert³^ORCID

Affiliation:

1. Jeonbuk National University

2. Yonsei University

3. University of Texas at Arlington

Abstract

A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.

Funder

National Research Foundation of Korea

Samsung

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

Reference10 articles.

1. Spectroscopic polarimetry with a channeled spectrum

2. Spectral interferometric technique to measure the ellipsometric phase of a thin-film structure

3. Parallel spectroscopic ellipsometry for ultra-fast thin film characterization

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Robust dynamic spectroscopic imaging ellipsometer based on a monolithic polarizing Linnik interferometer;Optics Express;2023-05-26

2. High speed thin film thickness mapping by using dynamic spectroscopic imaging ellipsometry;Optical Technology and Measurement for Industrial Applications Conference 2022;2022-12-08