Affiliation:
1. Jeonbuk National University
2. Yonsei University
3. University of Texas at Arlington
Abstract
A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.
Funder
National Research Foundation of Korea
Samsung
Subject
Atomic and Molecular Physics, and Optics
Cited by
8 articles.
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