Spectral interferometric technique to measure the ellipsometric phase of a thin-film structure
Author:
Funder
Ministry of Education, Youth and Sports of the Czech Republic
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference11 articles.
1. The calculation of thin film parameters from spectroscopic ellipsometry data
2. Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry
3. Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target
4. Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film
5. Effects of phase changes on reflection and their wavelength dependence in optical profilometry
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