Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1147074
Reference13 articles.
1. Optical probes of organic thin films: Photons-in and photons-out
2. New developments in spectroellipsometry: the challenge of surfaces
3. Spatially resolved ellipsometry
4. GEOMETRICAL RESOLUTION IN THE COMPARISON ELLIPSOMETER
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