Vacancy-type defects in TiN/ZrO2/TiN capacitors probed by monoenergetic positron beams-Reference-Cited by-同舟云学术

Vacancy-type defects in TiN/ZrO2/TiN capacitors probed by monoenergetic positron beams

Published:2022-11 Issue: Volume:762 Page:139557
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Uedono Akira,Takahashi Naomichi,Hasunuma Ryu,Harashima Yosuke^ORCID,Shigeta Yasuteru^ORCID,Ni Zeyuan^ORCID,Matsui Hidefumi^ORCID,Notake Akira^ORCID,Kubo Atsushi,Moriya Tsuyoshi^ORCID,Michishio Koji^ORCID,Oshima Nagayasu^ORCID,Ishibashi Shoji^ORCID

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

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1. Hybrid reactant-enabled atomic layer deposition of HfO2 for enhancing metal-insulator-metal capacitor fabricated on TiN electrode;Materials Today Communications;2024-08

2. Dielectric Constant Enhancement and Leakage Current Suppression of Metal–Insulator–Metal Capacitors by Atomic Layer Annealing and the Capping Layer Effect Prepared with a Low Thermal Budget;ACS Applied Electronic Materials;2023-04-17