Permittivity increase of yttrium-doped HfO2 through structural phase transformation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1880436
Reference7 articles.
1. First-principles study of structural, vibrational, and lattice dielectric properties of hafnium oxide
2. The Yttria-Hafnia System
3. Epitaxial growth of yttrium-stabilized HfO2 high-kgate dielectric thin films on Si
4. Thermal behavior of the amorphous precursors of the HfO2–Fe2O3 system
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