Electromigration in two-level interconnects of Cu and Al alloys
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference27 articles.
1. Electromigration in metals
2. Electromigration Damage in Aluminum Film Conductors
3. Electromigration in Thin Films
4. Electromigration in Al(Cu) two‐level structures: Effect of Cu and kinetics of damage formation
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